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Proceedings Paper

Study And Application Of Laser Created X-Ray Sources
Author(s): H. Pepin; P Alaterre; M Chaker; P Lavigne; F Martin; R Fabbro; B Faral; D Nagel; M Peckerar
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Paper Abstract

Laser produced X-ray spectra are studied both theoretically and experimentally in the range 0.1-5 keV for laser wavelengths λ = 0.26 μm and λ = 0.53 μm. The X-ray conversion efficiencies in various spectral ranges are presented. It is possible to obtain from a laser plasma source a well characterized X-ray spectra. As an example of application, the exposure of P.B.S. resist is studied both in the XUV and soft X-ray ranges.

Paper Details

Date Published: 21 October 1986
PDF: 7 pages
Proc. SPIE 0664, High Intensity Laser Processes, (21 October 1986); doi: 10.1117/12.938700
Show Author Affiliations
H. Pepin, Universite du Quebec (Canada)
P Alaterre, Universite du Quebec (Canada)
M Chaker, Universite du Quebec (Canada)
P Lavigne, Universite du Quebec (Canada)
F Martin, Universite du Quebec (Canada)
R Fabbro, Laboratoire de Physique des Milieux Ionises (France)
B Faral, Laboratoire de Physique des Milieux Ionises (France)
D Nagel, Naval Research Laboratory (United States)
M Peckerar, Naval Research Laboratory (United States)

Published in SPIE Proceedings Vol. 0664:
High Intensity Laser Processes
John A. Alcock, Editor(s)

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