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Proceedings Paper

Heterodyne Interferometer For Surface Profile Measurements In The Angstrom Region
Author(s): Dan Pantzer; Jacob Politch; Leif Ek
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Paper Abstract

A fast and versatile interferometric system for measuring surface profiles of flat optical surfaces without the need of a separate reference surface will be presented. The instrument is capable of resolving height variations of about 50 Å, while lateral resolution is 3 m. The profile measurement takes 20 seconds, and statistical properties like rms height, slope and spectral density can be calculated from the profile. No extensive alignment of the sample is needed, and scan lengths of 100 micrometers to several millimeters are obtainable.

Paper Details

Date Published: 20 October 1986
PDF: 6 pages
Proc. SPIE 0656, Contemporary Optical Instrument Design, Fabrication, and Testing, (20 October 1986); doi: 10.1117/12.938482
Show Author Affiliations
Dan Pantzer, The Royal Institute of Technology (Sweden)
Jacob Politch, Israel Institute of Technology (Israel)
Leif Ek, The Royal Institute of Technology (Sweden)

Published in SPIE Proceedings Vol. 0656:
Contemporary Optical Instrument Design, Fabrication, and Testing
Leo H. J. F. Beckmann; J. David Briers; Paul R. Yoder Jr., Editor(s)

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