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Proceedings Paper

Total Integrated Scatter Measurement System For Quality Assessment Of Coatings On Optical Surfaces
Author(s): Lars Mattsson
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Paper Abstract

Total integrated scatter (TIS) measurements are discussed on the basis of the proposed ASTM standard for surface characterization. A TIS-apparatus built in accordance with this standard is presented and measurements are reported for samples ranging in roughness from 1 A to 150 A. Si-wafers are demonstrated to possess excellent surface quality and made measurements of roughness from an 1100 A Al-film possible.

Paper Details

Date Published: 13 October 1986
PDF: 8 pages
Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938389
Show Author Affiliations
Lars Mattsson, The Royal Institute of Technology (Sweden)

Published in SPIE Proceedings Vol. 0652:
Thin Film Technologies II
J. Roland Jacobsson, Editor(s)

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