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Proceedings Paper

Measurement Of Scattering Distribution For Characterization Of The Roughness Of Coated Or Uncoated Substrates
Author(s): F Roche; C Amra; E Pelletier
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Paper Abstract

Measurement of spatial distribution of scattered flux combined with a vector theory of surface scattering, leads to the characterization of micropolishes in modern optics. Our techniques for transparent and non-transparent substrates are described. When applied to multilayer optical coatings, the scattering studies give informations on material microstructure defects. Recent developments realized in Marseilles in this field are analized.

Paper Details

Date Published: 13 October 1986
PDF: 8 pages
Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938388
Show Author Affiliations
F Roche, Domaine Universitaire de St Jerome (France)
C Amra, Domaine Universitaire de St Jerome (France)
E Pelletier, Domaine Universitaire de St Jerome (France)

Published in SPIE Proceedings Vol. 0652:
Thin Film Technologies II
J. Roland Jacobsson, Editor(s)

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