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Proceedings Paper

Dimensional Measurement Of Moving Holes Using Spatial Filtering
Author(s): Yoshiro Suemoto
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Paper Abstract

The measurement of the size of moving holes is described by processing their image using spatial filtering and converting their size to electrical signal. In the present case, the shape of the hole was assumed to be circular and the band-pass filter giving high sensitiv-ity was designed. In deciding the aperture size for the photodetector, tolerance to position fluctuation of the moving holes was taken into consideration. Dealing with the holes of various size within 30011m ±10% diameter, the accuracy obtained was within l%,i.e. 3μm. Moving speed of the holes was 20cm/sec and their position fluctuation was allowable near to their size.

Paper Details

Date Published: 17 November 1986
PDF: 7 pages
Proc. SPIE 0654, Automatic Optical Inspection, (17 November 1986); doi: 10.1117/12.938285
Show Author Affiliations
Yoshiro Suemoto, Kagoshima University (Japan)

Published in SPIE Proceedings Vol. 0654:
Automatic Optical Inspection
Lionel R. Baker; H. John Caulfield, Editor(s)

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