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Proceedings Paper

Laser Based In-Process Dimension Measurement And Control
Author(s): Richard H. Moore
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Paper Abstract

In-process noncontact dimensional measurement and control systems incorporating laser sensors and microprocessor-based electronics provide higher levels of performance than heretofore possible using more conventional techniques. Because of their rugged construction, these systems can make measurements on the process line as well as have a substantial impact on process yields and scrap reduction. Many such systems have been produced and applied. This paper reviews the significant technical features and their impact on the production process. Several interesting applications are discussed.

Paper Details

Date Published: 15 December 1978
PDF: 3 pages
Proc. SPIE 0153, Advances in Optical Metrology I, (15 December 1978); doi: 10.1117/12.938209
Show Author Affiliations
Richard H. Moore, Zygo Corporation (United States)


Published in SPIE Proceedings Vol. 0153:
Advances in Optical Metrology I
N. Balasubramanian; James C. Wyant, Editor(s)

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