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Proceedings Paper

Important Parameters of Excimer Lasers: Relevant Topics of Current Research
Author(s): K L Kompa
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Paper Abstract

Excimer lasers have become one of the most important types of lasers for applications in materials technology, chemical processing, atmospheric diagnostics and research in the chemical and biological sciences. This paper attempts a brief summary of the present state of development and future perspectives for this class of lasers. The discussion is organized in three sections according to the following list of topics: I) Laser physics and spectroscopy - Survey of emission wavelengths and types of transitions - Laser kinetics - Gain, amplification, energy extraction, short pulses - Frequency variation to longer and shorter wavelengths - New systems II) Performance and output - Pumping schemes and prei-onization - Chemicals and materials problems - Excimer laser performance data: Present and future III) Selected applications - Basic research - Remote sensing - Materials working - Chemical processing - Treatment of biosystems

Paper Details

Date Published: 21 October 1986
PDF: 7 pages
Proc. SPIE 0650, High Power Lasers and Their Industrial Applications, (21 October 1986); doi: 10.1117/12.938083
Show Author Affiliations
K L Kompa, Max-Planck-Institut fur Quantenoptik (Germany)

Published in SPIE Proceedings Vol. 0650:
High Power Lasers and Their Industrial Applications
Dieter Schuoecker, Editor(s)

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