The quality of optical surfaces produced by diamond machining depends on a very high level of isolation of both inherent and transmitted vibrational disturbances at submicron scales. The surface texture of a diamond turned surface consists of a periodic structure whose geometric shape depends on tool geometry and machine feed parameters. The finite compliance of the machine structures and the workpiece will result in the generation of small-scale vibrations. Resonances may thereby arise and spurious additional periodic perturbations will be produced on the diamond machined surface. Form errors will also arise as a result of workpiece vibration. Understanding the natural modes of vibration has been addressed using interferometric and piezoelectric measurement techniques. These will be discussed in this paper with reference to the production of high quality diamond turned surfaces.

Date Published: 26 August 1987
PDF: 14 pages
Proc. SPIE 0732, 1st Intl Conf on Vibration Control in Optics and Metrology, (26 August 1987); doi: 10.1117/12.937922

Published in SPIE Proceedings Vol. 0732:
1st Intl Conf on Vibration Control in Optics and Metrology
Lionel R. Baker; Daniel Vukobratovich, Editor(s)