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Proceedings Paper

Monolithically Integrable High Speed Photodetectors
Author(s): D J Jackson; D L Persechini
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Paper Abstract

Monolithically integrable lateral PIN detectors have been developed. The device fabrication procedure has been optimized to be compatible with standard integrated circuit fabrication procedures.

Paper Details

Date Published: 23 February 1987
PDF: 5 pages
Proc. SPIE 0716, High Frequency Optical Communications, (23 February 1987);
Show Author Affiliations
D J Jackson, Hughes Research Laboratories (United States)
D L Persechini, Hughes Research Laboratories (United States)

Published in SPIE Proceedings Vol. 0716:
High Frequency Optical Communications
O. Glenn Ramer; Paul Sierak, Editor(s)

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