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Proceedings Paper

Excimer Laser Processing Of Semiconductor Devices: High-Efficiency Solar Cells
Author(s): R. F. Wood
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Paper Abstract

Over the past decade, laser processing of semiconductors has developed into an area of widespread interest in solid state physics, materials science, and semiconductor device technology. Initially, most of the work on pulsed laser processing was carried out with solid state lasers such as ruby and Nd:YAG lasers. These lasers have several inherent characteristics that make them less than ideal for studies of laser processing and that would seemingly prohibit their use in many commercial applications. More recently, results which demonstrate that ultraviolet excimer lasers offer many desirable characteristics for the laser processing of materials, have been reported in the literature. Solar cells are relatively simple semiconductor devices that are of considerable interest in their own right and provide a useful testing ground for the application of laser techniques to semi-conductor processing. In this paper, some important aspects of pulsed laser processing of semiconductors are reviewed, the advantages of excimer lasers for such work are assessed, the present status of laser processing of high-efficiency solar cells is discussed, and finally the possible future directions of this type of work are briefly mentioned.

Paper Details

Date Published: 11 March 1987
PDF: 11 pages
Proc. SPIE 0710, Excimer Lasers and Optics, (11 March 1987); doi: 10.1117/12.937298
Show Author Affiliations
R. F. Wood, Oak Ridge National Laboratory (United States)

Published in SPIE Proceedings Vol. 0710:
Excimer Lasers and Optics
Ting-Shan Luk, Editor(s)

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