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Proceedings Paper

Advances In Excimer Laser Lithography
Author(s): Kanti Jain
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Paper Abstract

This paper reviews the rapidly emerging field of excimer laser lithography. Beginning with the first contact printing experiments, developments in excimer laser projection printing on various commercial lithographic machines are reviewed. Recent results obtained with full-field scanning projection systems as well as step-and-repeat tools are summarized. Future directions in optical lithography are examined in view of these advances. Finally, a discussion of various key excimer laser parameters is presented from two points of view: availability, and requirements for various practical lithographic systems.

Paper Details

Date Published: 11 March 1987
PDF: 8 pages
Proc. SPIE 0710, Excimer Lasers and Optics, (11 March 1987); doi: 10.1117/12.937294
Show Author Affiliations
Kanti Jain, I.B.M. Corporate Headquarters (United States)

Published in SPIE Proceedings Vol. 0710:
Excimer Lasers and Optics
Ting-Shan Luk, Editor(s)

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