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Proceedings Paper

CCD's for High Resolution Imaging in the Near and Far UV
Author(s): J. T. Bosiers; N. S. Saks; D. McCarthy; M. C. Peckerar; D. J. Michels
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Paper Abstract

This paper describes the development of backside illuminated, deep-depletion charge coupled devices (CCD's) optimized for imaging in the ultraviolet. A model is presented to describe the UV detection process at the CCD backside, and the factors controlling the UV quantum efficiency. A 32 x 32-pixel area imager was obtained with excellent operating characteristics, such as high transport efficiency and low readout rwise. By appropriate treatments of the CCD backside, a quantum efficiency of 20% at 1216 Å was obtained on the best devices. Good resolution was obtained in the visible and UV regions of the spectrum.

Paper Details

Date Published: 10 December 1986
PDF: 10 pages
Proc. SPIE 0687, Ultraviolet Technology, (10 December 1986); doi: 10.1117/12.936551
Show Author Affiliations
J. T. Bosiers, Sachs-Freeman Associates (United States)
N. S. Saks, Naval Research Laboratory (United States)
D. McCarthy, Naval Research Laboratory (United States)
M. C. Peckerar, Naval Research Laboratory (United States)
D. J. Michels, Naval Research Laboratory (United States)

Published in SPIE Proceedings Vol. 0687:
Ultraviolet Technology
Robert E. Huffman, Editor(s)

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