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Proceedings Paper

Conduction Pronerties Of Annealed (Hg[sub].8[/sub]Cd[sub].2[/sub])Te Thin Films On Silicon Substrates Prepared By Triode-Sputtering With Substrate Bias
Author(s): Ro y H. Cornely; Lawrence Suchow; Robert Bourne; Michael Mulligan; Riaz Haq; Chia-Jen Wu
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Paper Abstract

A large number of (Hg.8Cd.2)Te films, about ten microns thick, were prepared on low-cost Si substrates by r.f..triode-sputtering in a Hg atmosphere. The sensitivity of the film conduction properties to small changes in snutter-deposition parameters (particularly Hg sputtering gas pressure and substrate dc bias and temnerature) and to post deposition annealina parameters was studied by Vanderpauw Hall effect measurements variable tempera-ture and magnetic field. Wavelength dispersive electron-probe microanalysis and optical absorption analysis were used to measure the film composition which under the proper souttering conditions matched the nominal composition value of the pressed-powder target in the 0.2-0.27 x value range. Substrate bias to remove impurities depositing during the sputter-ing process was found to be effective for obtaining n-type films with carrier concentrations as low as 1015 cm-3 at 1000oK. Although the electron mobilities were only about 10% of bulk values, the experimental results indicate that considerable improvement can be obtained by further fine tuning of the deposiiton and annealing parameters.

Paper Details

Date Published: 30 November 1983
PDF: 12 pages
Proc. SPIE 0409, Technical Issues in Infrared Detectors and Arrays, (30 November 1983); doi: 10.1117/12.935731
Show Author Affiliations
Ro y H. Cornely, Department of Electrical Engineering (United States)
Lawrence Suchow, Department of Chemical Engineering and Chemistry (United States)
Robert Bourne, New Jersey Institute of Technology (United States)
Michael Mulligan, New Jersey Institute of Technology (United States)
Riaz Haq, New Jersey Institute of Technology (United States)
Chia-Jen Wu, New Jersey Institute of Technology (United States)

Published in SPIE Proceedings Vol. 0409:
Technical Issues in Infrared Detectors and Arrays
Esther Krikorian, Editor(s)

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