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Proceedings Paper

One Dimensional Linear Refractive Index Profiles From Angular Reflectivity Measurements At One Wavelength
Author(s): M. N. Grimbergen; R. B. Goldner
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Paper Abstract

A technique has been developed to determine one-dimensional linear refractive index profiles for planar thin films from angular reflectivity measurements at one wavelength. The technique uses a nonlinear least-squares fitting algorithm, together with a multilayer characteristic matrix model. The fitting error is examined as a function of adjustable parameters using a three-dimensional graphing routine. From synthetic data it is demonstrated that, within the domain of chosen adjustable parameters and realistic experimental uncertainties, a best linear profile fit can be obtained. The technique is demonstrated using reflectance data on laboratory samples of In203:Sn.

Paper Details

Date Published: 28 November 1983
PDF: 8 pages
Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); doi: 10.1117/12.935519
Show Author Affiliations
M. N. Grimbergen, Tufts University (United States)
R. B. Goldner, Tufts University (United States)

Published in SPIE Proceedings Vol. 0401:
Thin Film Technologies I
J. Roland Jacobsson, Editor(s)

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