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Proceedings Paper

Digital Signal Processing Of Optical Monitoring By Means Of A Kalman Filter
Author(s): M. Nixon; J. S. Seeley
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Paper Abstract

A Kalman filter algorithm has been applied to interpret the optical reflectance excursions during vacuum deposition of infrared coatings and multilayer thin-film filters. The application has been described in detail elsewhere and this paper now reports on-line experience for estimating deposition rate and thickness. The estimation proved sufficiently reliable to firstly 'navigate' regular manufacture (as controlled by a skilled operator) and to subsequently reproduce the skill without interpretation or intervention whilst maintaining exemplary product quality. Optical control by means of this Kalman filter application is therefore considered suitable as a basis for the automated manufacture of infrared coatings and multilayer thin-film filters.

Paper Details

Date Published: 28 November 1983
PDF: 7 pages
Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); doi: 10.1117/12.935507
Show Author Affiliations
M. Nixon, University of Reading (England)
J. S. Seeley, University of Reading (England)

Published in SPIE Proceedings Vol. 0401:
Thin Film Technologies I
J. Roland Jacobsson, Editor(s)

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