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Proceedings Paper

Automated Control Of Optical Layer Fabrication Processes
Author(s): R. Herrmann; A. Zoller
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Paper Abstract

An automated control system for evaporation and sputtering plants is presented. It consists of an optical monitoring system (OMS 2000) and a control unit (LEYCOM) based on a 16 bit microprocessor.This system has been successfully in operation since three years. The OMS 2000 is a single wavelength monitoring system designed for measuring the reflectance or transmittance of a test glass during deposition of the coating. It has the additional capability of terminating the evaporation when a preselected intensity value is reached or when the measured intensity passes through an extremum. Different optical monitoring methods, which can be executed with the OMS 2000, are discussed with respect to their error compensation effect. When using a special 6 fold test glass changer a special monitoring method is possible which makes monitoring of non-quarterwave layer systems rather easy and which exhibits a useful error compensation effect for edge filters.

Paper Details

Date Published: 28 November 1983
PDF: 10 pages
Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); doi: 10.1117/12.935506
Show Author Affiliations
R. Herrmann, R&D department for coating Leybold-Heraeus GmbH (West Germany)
A. Zoller, R&D department for coating Leybold-Heraeus GmbH (West Germany)

Published in SPIE Proceedings Vol. 0401:
Thin Film Technologies I
J. Roland Jacobsson, Editor(s)

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