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Proceedings Paper

Monitoring Of Optical Thin Films During Deposition
Author(s): E. Pelletier
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Paper Abstract

By direct measurement of the evolution of the optical properties of a dielectric multilayer during its deposition we have access in real time to data on the thickness, the index and the structure of each individual layer. We describe such techniques which have been put into operation in Marseille to tackle the specific problem of monitoring the deposition of optical coatings on surfaces. We analyse the causes of the performance limitations of these monitoring methods.

Paper Details

Date Published: 28 November 1983
PDF: 9 pages
Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); doi: 10.1117/12.935505
Show Author Affiliations
E. Pelletier, Domaine Universitaire de Saint Jerome (France)

Published in SPIE Proceedings Vol. 0401:
Thin Film Technologies I
J. Roland Jacobsson, Editor(s)

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