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Proceedings Paper

Optical And Protective Properties Of Hard Carbon Coatings
Author(s): B. Dischler; A. Bubenzer; P. Koidl; G. Brandt
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Paper Abstract

In recent years amorphous carbon coatings found growing interest because of their optical and protective properties. We have deposited hydrogenated amorphous carbon films (a-C:H) from an RF excited discharge in benzene vapour. Substrates include germanium, glass and MgF2. The refractive index can be tuned between 1.8 and 2.2 and efficient antireflection coatings on Ge have been prepared. We have determined the optical absorption from the UV to the IR range (0.2 - 25 μm). A typical 1 µm thick a-C:H film is transparent (> 50% transmission) from 750 nm to the far infrared. Amorphous carbon films are harder than sapphire and are resistant to concentrated acids and bases.

Paper Details

Date Published: 18 September 1983
PDF: 6 pages
Proc. SPIE 0400, New Optical Materials, (18 September 1983); doi: 10.1117/12.935488
Show Author Affiliations
B. Dischler, Fraunhofer-Institute for Applied Solid State Physics (Germany)
A. Bubenzer, Fraunhofer-Institute for Applied Solid State Physics (Germany)
P. Koidl, Fraunhofer-Institute for Applied Solid State Physics (Germany)
G. Brandt, Fraunhofer-Institute for Applied Solid State Physics (Germany)

Published in SPIE Proceedings Vol. 0400:
New Optical Materials
Solomon Musikant; Josette Dupuy, Editor(s)

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