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Proceedings Paper

Multi-Element Thin Film Chemical Microsensors
Author(s): Imants Lauks
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Paper Abstract

A review of the science and technology of chemical sensing using planar micro-fabricated thin film potentiometric electrodes is presented. Those aspects of technology of stratified media that are especially peculiar to this class of structures, namely fabrication of thin film composites consisting of inoraanics, organics, gels and heterogeneous mixtures of these on planar electronic substrates are discussed. Problems encountered in patterning of this broad range of materials for the fabrication of chemical sensor arrays are emphasized.

Paper Details

Date Published: 8 November 1983
PDF: 13 pages
Proc. SPIE 0387, Technology of Stratified Media, (8 November 1983); doi: 10.1117/12.934992
Show Author Affiliations
Imants Lauks, University of Pennsylvania (United States)

Published in SPIE Proceedings Vol. 0387:
Technology of Stratified Media
Roy F. Potter, Editor(s)

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