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Proceedings Paper

Laser Microchemistry For Direct Writing Of Microstructures
Author(s): R. M. Osgood Jr.; D. J. Ehrlich; T. F. Deutsch; D. J. Silversmith; A. Sanchez
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Paper Abstract

Microscopic laser-initiated chemical reactions can be used to write micrometer-scale features on materials of interest for solid-state electronics. In this paper, we describe the nature of direct-write-type fabrication and summarize the laser techniques which have been developed.

Paper Details

Date Published: 9 August 1983
PDF: 6 pages
Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); doi: 10.1117/12.934963
Show Author Affiliations
R. M. Osgood Jr., Columbia University (United States)
D. J. Ehrlich, Massachusetts Institute of Technology (United States)
T. F. Deutsch, Massachusetts Institute of Technology (United States)
D. J. Silversmith, Massachusetts Institute of Technology (United States)
A. Sanchez, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 0385:
Laser Processing of Semiconductor Devices
Charles C. Tang, Editor(s)

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