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Proceedings Paper

Rigorous Diffraction Theory Applied To Video Disk Geometries
Author(s): J. H.T. Pasman
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Paper Abstract

This paper briefly describes the principles of the recording and read-out of optical video discs, and presents a method to inspect pit geometries. The pit structure on the disc containing the video information is considered to act as a biaxial grating. It is shown that when continuous grooves are recorded on a disc, diffraction experiments give the dimensions of these grooves by comparing them to results of rigorous theory of diffraction by a finitely conducting uniaxial periodic structure with polygonal height profile. This measuring technique yields a precision of 3 nm in depth, 25 nm in width and 3° in slope.

Paper Details

Date Published: 16 June 1983
PDF: 7 pages
Proc. SPIE 0369, Max Born Centenary Conf, (16 June 1983); doi: 10.1117/12.934441
Show Author Affiliations
J. H.T. Pasman, Philips Research Laboratories (The Netherlands)

Published in SPIE Proceedings Vol. 0369:
Max Born Centenary Conf
M. John Colles; D. William Swift, Editor(s)

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