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Proceedings Paper

Methods Of Determining Optical Constants Of Thin Semiconductor Films Using Normal Incidence Reflectance And Transmittance Data
Author(s): D. R. McKenzie; R. C. McPhedran; N. Savvides; L. C. Botten; P. J. Martin; R. P. Netterfield
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Paper Abstract

Techniques for determining the optical constants of thin absorbing films are described and applied to the evaluation of the optical constants of carbon and silicon semiconductor films prepared by magnetron sputtering and ion beam sputtering techniques. The results are discussed with emphasis on the nature and origin of the optical gaps.

Paper Details

Date Published: 16 June 1983
PDF: 8 pages
Proc. SPIE 0369, Max Born Centenary Conf, (16 June 1983); doi: 10.1117/12.934355
Show Author Affiliations
D. R. McKenzie, University of Sydney (Australia)
R. C. McPhedran, University of Sydney (Australia)
N. Savvides, University of Sydney (Australia)
L. C. Botten, The New South Wales Institute of Technology (Australia)
P. J. Martin, CSIRO (Australia)
R. P. Netterfield, CSIRO (Australia)

Published in SPIE Proceedings Vol. 0369:
Max Born Centenary Conf
M. John Colles; D. William Swift, Editor(s)

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