Share Email Print

Proceedings Paper

Applications Of Scanning Optical Microscopy
Author(s): Colin J.R. Sheppard
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The scanning optical microscope (SOM) provides new information concerning a wide range of specimens. It is particularly advantageous for study of materials and devices, including semiconductors. The image is built up on a TV-type display by mechanically scanning the object across a focussed laser spot.

Paper Details

Date Published: 29 March 1983
PDF: 8 pages
Proc. SPIE 0368, Microscopy: Techniques and Capabilities, (29 March 1983); doi: 10.1117/12.934331
Show Author Affiliations
Colin J.R. Sheppard, University of Oxford (England)

Published in SPIE Proceedings Vol. 0368:
Microscopy: Techniques and Capabilities
Lionel R. Baker, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?