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Proceedings Paper

Scanning Electron Acoustic Microscopy
Author(s): G. Davies; A. Howie; L. Staveley-Smith
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Paper Abstract

The principles and basic imaging theory of electron acoustic microscopy are outlined and illustrated with images of semiconductor devices. Image contrast arises from local variations in stopping power and thermal properties of the specimen but variations in elastic properties are also important. In elastically anisotropic materials the contrast depends on crystallographic grain orientation. Examples of such grain contrast are discussed as well as of grain boundary contrast which is interesting but less well understood.

Paper Details

Date Published: 29 March 1983
PDF: 8 pages
Proc. SPIE 0368, Microscopy: Techniques and Capabilities, (29 March 1983); doi: 10.1117/12.934327
Show Author Affiliations
G. Davies, University of Cambridge (England)
A. Howie, University of Cambridge (England)
L. Staveley-Smith, University of Cambridge (England)

Published in SPIE Proceedings Vol. 0368:
Microscopy: Techniques and Capabilities
Lionel R. Baker, Editor(s)

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