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Proceedings Paper

X-Ray Microscopy: Recent Developments And Practical Applications
Author(s): B. Niemann; G. Schmahl; D. Rudolph
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Paper Abstract

X-ray microscopy using soft X-rays progressed successfully during past years. This paper discusses the atomic cross sections, the photoelectric absorption and the radiation damage for soft X-rays. Resulsts of contact microradiography are summarized. X-ray optics, which can be used for microscopy are zone plates, grazing incidence mirrors and normal incidence multi-layer mirrors, yet this has only been shown in practice with high resolution for zone plates. Details of the "Gottingen X-ray microscope" are given and a photographic image, showing 50 nm resolution, is shown. The future work of several groups is concentrated on the development of scanning X-ray microscopes.

Paper Details

Date Published: 29 March 1983
PDF: 7 pages
Proc. SPIE 0368, Microscopy: Techniques and Capabilities, (29 March 1983); doi: 10.1117/12.934316
Show Author Affiliations
B. Niemann, Universitats-Sternwarte (West Germany)
G. Schmahl, Universitats-Sternwarte (West Germany)
D. Rudolph, Universitats-Sternwarte (West Germany)

Published in SPIE Proceedings Vol. 0368:
Microscopy: Techniques and Capabilities
Lionel R. Baker, Editor(s)

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