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Proceedings Paper

Slider Induced Convection In Horizontal Liquid Phase Epitaxy (LPE) System
Author(s): S. Y. Leung; N. E. Schumaker
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Paper Abstract

The control of thickness uniformity and compositional homogeneity is extremely important in the growth of high quality heterostructure lasers. This is especially important in the growth of the thin active layer of these devices. Slider induced convection within the growth solution in the horizontal LPE system can affect both of these factors and has been largely neglected in the modeling of layer growth. A Plexiglas boat with water and dyes was used to simulate the fluid motions in the melts of the horizontal LPE system. The simulation shows that there are substantial fluid motions induced by the movement of the slider. The duration of the convective cell thus generated can be comparable to the growth time of thin layers. Therefore, a substantial portion of the growth time for thin layers is under nonsteady state conditions where the solution is not static. Furthermore, convection dominates in the initial period of epitaxial growth. The dependence of the convective cell on melt geometry is discussed. A video tape was made showing the solution dynamics of several boat designs used in the growth of (GaA1)As heterostructure lasers.

Paper Details

Date Published: 15 September 1982
PDF: 8 pages
Proc. SPIE 0323, Semiconductor Growth Technology, (15 September 1982); doi: 10.1117/12.934291
Show Author Affiliations
S. Y. Leung, Bell Laboratories (United States)
N. E. Schumaker, Bell Laboratories (United States)

Published in SPIE Proceedings Vol. 0323:
Semiconductor Growth Technology
Esther Krikorian, Editor(s)

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