Share Email Print

Proceedings Paper

Description And Limitations Of An Automated Scatterometer
Author(s): William L. Wolfe; Frederick O. Bartell; Lawrence D. Brooks
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The methods, capabilities and limitations of a multiwavelength scatterometer are described.

Paper Details

Date Published: 5 April 1983
PDF: 5 pages
Proc. SPIE 0362, Scattering in Optical Materials II, (5 April 1983); doi: 10.1117/12.934149
Show Author Affiliations
William L. Wolfe, University of Arizona (United States)
Frederick O. Bartell, University of Arizona (United States)
Lawrence D. Brooks, Rockwell International (United States)

Published in SPIE Proceedings Vol. 0362:
Scattering in Optical Materials II
Solomon Musikant, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?