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Proceedings Paper

Integrated Circuit (IC) Chip Inspection With Incoherent Optical Processing
Author(s): F. T.S. Yu; S. L. Zhuang; N. H. Wang
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Paper Abstract

In this paper, we propose the use of an incoherent optical image subtraction technique for automatic micro-circuit board inspection. We believe that this proposed technique would have profound effect on automatic inspection scheme in the application of faulty detection and identification of micro-circuitries. The technique would provide the capability of rapid identification, inspection, and possibly utilizing for synthesis and fabrication. Experimental simulation of the IC chip inspection is provided.

Paper Details

Date Published: 23 May 1983
PDF: 8 pages
Proc. SPIE 0360, Robotics and Industrial Inspection, (23 May 1983); doi: 10.1117/12.934116
Show Author Affiliations
F. T.S. Yu, The Pennsylvania State University (United States)
S. L. Zhuang, The Pennsylvania State University (United States)
N. H. Wang, The Pennsylvania State University (United States)


Published in SPIE Proceedings Vol. 0360:
Robotics and Industrial Inspection
David P. Casasent, Editor(s)

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