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Proceedings Paper

High Speed Direct Write Electron Beam System
Author(s): Frank Ura; Paul Rissman
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Paper Abstract

The total sales dollars of semiconductors over the past six years have grown roughly at the rate of 25% per year in spite of the fact that the price of some of the individual components has decreased dramatically. This has resulted in a significant reduction in the cost per function. As this occurs, new markets open up creating additional demands.

Paper Details

Date Published: 30 June 1982
PDF: 5 pages
Proc. SPIE 0333, Submicron Lithography I, (30 June 1982); doi: 10.1117/12.933417
Show Author Affiliations
Frank Ura, Hewlett Packard Laboratories (United States)
Paul Rissman, Hewlett Packard Laboratories (United States)


Published in SPIE Proceedings Vol. 0333:
Submicron Lithography I
Phillip D. Blais, Editor(s)

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