Proceedings PaperStress, Adherence, Hardness, And Density Of Optical Thin Films
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Results of measurements on mechanical properties of metal films (Ag, Al, Cr) and of some dielectric films (mainly MgF2, CaF2, BaF2) used in optics are presented and discussed. The obtained values showed a strong dependence on preparation conditions (residual atmosphere, deposition rate). Structural and microstructural investigations provided the data required to calculate the intrinsic tensile stress of polycrystalline MgF2 and Cr films according to a grainboundary model.