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Proceedings Paper

Using E-Beam Written Computer-Generated Holograms To Test Deep Aspheric Wavefronts
Author(s): K. M. Leung; S. M. Arnold; J. C. Lindquist
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Paper Abstract

The use of computer-generated holograms (CGHs) to test aspheric surfaces fabricated by modern optical methods such as diamond-turned machining has become increasingly important. The making of CGHs may, however, be limited in spatial resolution and space-bandwidth product provided by commercial optical recording devices. We will demonstrate that CGHs of high spatial resolution and large space-bandwidth product can be written directly on electron-resist using e-beam lithography. This approach not only reduces plotti9g errors normally introduced by optical recording devices, but also provides more than 100 distor-tion-free resolution picture elements in a synthetic hologram of correct size. In this paper, we will discuss how to make such a synthetic hologram by means of e-beam lithography. The performance of this CGH will be demonstrated by comparing with a non-rotationally symmetric aspheric wavefront of over 100 waves of spherical aberration using a concave mirror and plane parallel plate combination as the test piece.

Paper Details

Date Published: 31 March 1982
PDF: 7 pages
Proc. SPIE 0306, Contemporary Methods of Optical Fabrication, (31 March 1982); doi: 10.1117/12.932745
Show Author Affiliations
K. M. Leung, Honeywell Corporate Technology Center (United States)
S. M. Arnold, Honeywell Corporate Technology Center (United States)
J. C. Lindquist, Honeywell Corporate Technology Center (United States)

Published in SPIE Proceedings Vol. 0306:
Contemporary Methods of Optical Fabrication
Charles L. Stonecypher, Editor(s)

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