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Proceedings Paper

Microwave Curing: Is It A Reality?
Author(s): Mary Ann Hockey
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Paper Abstract

The curing or prebaking of photoresist-coated substrates using microwave radiation has several characteristics that are useful when processing LSI circuits. Some properties of microwave energy, the process results obtained with its utilization, and the advantages for photoresist baking will be presented.

Paper Details

Date Published: 28 July 1981
PDF: 11 pages
Proc. SPIE 0275, Semiconductor Microlithography VI, (28 July 1981); doi: 10.1117/12.931892
Show Author Affiliations
Mary Ann Hockey, NCR Corporation (United States)

Published in SPIE Proceedings Vol. 0275:
Semiconductor Microlithography VI
James W. Dey, Editor(s)

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