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Proceedings Paper

Optical Properties Of Lamelliform Materials
Author(s): Roy F. Potter
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Paper Abstract

Planar technology for today's electronic devices (ic's, p wave devices, IR detectors, etc.) are constructed of lamellae of metals, insulators and semi-conductors of varying thicknesses. Because thickness and material properties affect device parameters and influ-ence performance characteristics, their measurement and control is essential. Optical property measurements of these lamelliforms provide non-destructive techniques for acquiring information pertinent to device performance characteristics. A brief review of the charac-teristic matrix for the E-M wave equations is given, leading to the matrices involving the Fresnel relations. The relationships of reflectance, transmittance, and absorbtance (emit-tance) for both polarizations and all angles of incidence for a thick plane-parallel dielectric slab, having two differing series of layers on either side, will be given. A description of these relationships applied to a thin (d/λ > 2%) layer on an opaque substrate is presented. Included is a brief description of the two angle of incidence technique of AIRS (Angle of Incidence Reflection Spectroscopy) for studying such systems.

Paper Details

Date Published: 30 April 1981
PDF: 10 pages
Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); doi: 10.1117/12.931707
Show Author Affiliations
Roy F. Potter, Western Washington University (United States)

Published in SPIE Proceedings Vol. 0276:
Optical Characterization Techniques for Semiconductor Technology
David E. Aspnes; Roy F. Potter; Samuel S. So, Editor(s)

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