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Proceedings Paper

Upper roughness limitations on the TIS/RMS relationship
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Paper Abstract

The relationship between total integrated scatter and rms roughness was developed in the radar literature and enabled the first use of scatter measurements to monitor optical roughness. This relationship has been used and misused ever since. Its most common form makes use of a smooth surface approximation and has been applied to optical surfaces now for half a century. It has been suggested that Davies’ exponential form can be applied to much rougher surfaces. This paper investigates that issue through a combination of approximate and rigorous calculations made on optically deep sinusoidal gratings and a few measurements.

Paper Details

Date Published: 15 October 2012
PDF: 7 pages
Proc. SPIE 8495, Reflection, Scattering, and Diffraction from Surfaces III, 849503 (15 October 2012); doi: 10.1117/12.930770
Show Author Affiliations
John C. Stover, The Scatter Works Inc. (United States)
Sven Schröder, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Thomas A. Germer, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 8495:
Reflection, Scattering, and Diffraction from Surfaces III
Leonard M. Hanssen, Editor(s)

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