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Proceedings Paper

Optical testing for meter size aspheric optics
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Paper Abstract

Several meter size steep aspheric optics, with aspheric departure ranging from 100μm to 2mm, have been successfully fabricated at the College of Optical Sciences at University of Arizona. Optical metrology systems have been developed for measuring the optical surfaces efficiently and accurately. These systems include laser tracker surface profiler, swing arm optical CMM with different type of sensors, slope measurements with SCOTS, the Software Configurable Optical Test System (SCOTS) and interferometry with computer generated holograms. We summarize the test methods and provide comparison of the relative strengths and weaknesses.

Paper Details

Date Published: 25 October 2012
PDF: 12 pages
Proc. SPIE 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, 84660S (25 October 2012); doi: 10.1117/12.930513
Show Author Affiliations
Peng Su, College of Optical Sciences, The Univ. of Arizona (United States)
Chang Jin Oh, College of Optical Sciences, The Univ. of Arizona (United States)
Chunyu Zhao, College of Optical Sciences, The Univ. of Arizona (United States)
James H. Burge, College of Optical Sciences, The Univ. of Arizona (United States)
Steward Observatory, The Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 8466:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
Michael T. Postek; Victoria A. Coleman; Ndubuisi G. Orji, Editor(s)

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