Share Email Print

Proceedings Paper

Temporal modulation of synchrotron x-rays using torsional MEMS mirrors
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

We demonstrate the use of electrostatically driven micro-electromechanical systems (MEMS) devices to control and deliver synchrotron x-ray pulses at high repetition rates. Torsional MEMS micromirrors, rotating at duty cycles of 2 kHz and higher, were used to modulate grazing-incidence x rays, producing x-ray bunches shorter than 10 μs. We find that dynamic deformation of the oscillating micromirror is a limiting factor in the duration of the x-ray pulses produced, and we describe plans for reaching higher operating frequencies using mirrors designed for minimal deformation.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8502, Advances in X-Ray/EUV Optics and Components VII, 85020H (15 October 2012); doi: 10.1117/12.930057
Show Author Affiliations
Donald A. Walko, Argonne National Lab. (United States)
Il Woong Jung, Argonne National Lab. (United States)
Daniel Lopez, Argonne National Lab. (United States)
Deepkishore Mukhopadhyay, Argonne National Lab. (United States)
Craig P. Schwartz, Argonne National Lab. (United States)
Gopal K. Shenoy, Argonne National Lab. (United States)
Jin Wang, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 8502:
Advances in X-Ray/EUV Optics and Components VII
Shunji Goto; Christian Morawe; Ali M. Khounsary, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?