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Proceedings Paper

Surface characterization using combined analysis of original and scatter image
Author(s): Wenjing Zhao; Cornelius Hahlweg; Hendrik Rothe
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Paper Abstract

In a corresponding paper the optical design of combined microscopic and scatterometrical imaging devices is extensively discussed. The current paper deals with concepts of the necessary combined data analysis. A major problem is the fact that usually only the power distributions of both original and scatter images can be measured with arguable effort, and so both domains have to offer certain non-redundant information. Basic concepts, theoretical investigations of limitations and examples from typical applications are presented.

Paper Details

Date Published: 15 October 2012
PDF: 8 pages
Proc. SPIE 8495, Reflection, Scattering, and Diffraction from Surfaces III, 849508 (15 October 2012); doi: 10.1117/12.929472
Show Author Affiliations
Wenjing Zhao, Helmut-Schmidt Univ. (Germany)
Cornelius Hahlweg, Helmut-Schmidt Univ. (Germany)
Hendrik Rothe, Helmut-Schmidt Univ. (Germany)

Published in SPIE Proceedings Vol. 8495:
Reflection, Scattering, and Diffraction from Surfaces III
Leonard M. Hanssen, Editor(s)

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