Proceedings PaperMEMS-based micro-optical switch for display devices
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This paper presents a micro electromechanical system (MEMS) based micro optical switch for display devices. The size of the micro optical switch was 254 μm × 254 μm. The micro optical switch moves vertically by electrostatic force and consists of two parallel plate electrodes which have rectangular aperture array. The lower electrode was directly patterned on a glass substrate and the upper electrode was suspended by cantilever spring which was supported by anchors. The electrodes were made of thin aluminum film and the gap between two electrodes was 3.3 μm. The thickness of the electrodes was 0.3 μm respectively and the lower electrode was covered with 0.3 μm silicon dioxide. The width of the aperture and the metal were 8 μm and 5 μm respectively. The upper aperture array was aligned with the lower aperture array with 6.5 μm offset horizontally and the overlapping width of the two electrodes was 1.5 μm. The micro optical switch is in open state when no voltage is applied and the light passes through the two electrodes by the leakage or the reflection between the two electrodes. The micro optical switch is in close state when voltage is applied and the light is reflected to the backlight unit. The required voltages for pull in and pull out were 16.0 V and 11.4 V respectively. The switching time was 30 μs from the open state to the closed state and 50 μs from the closed state to the open state.