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Proceedings Paper

Sinusoidal wavelength-scanning interferometer for profile measurement of metal surfaces
Author(s): Osami Sasaki; Takahiro Kurashige; Samuel Choi; Takamasa Suzuki
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Paper Abstract

Sinusoidal wavelength-scanning (SWS) interferometry is unique in that a time-varying interference signal contains phase-modulation amplitude Zb due to the SWS besides a conventional phase α. Propagation time and wavefront of the light wave diffusely reflected from a metal surface can be detected from the amplitude Zb and the phase α, respectively. A concave shape with the depth of about a few hundreds microns is measured with an error less than a few microns by using only the amplitude Zb of the detected interference signal.

Paper Details

Date Published: 13 September 2012
PDF: 7 pages
Proc. SPIE 8493, Interferometry XVI: Techniques and Analysis, 84930M (13 September 2012); doi: 10.1117/12.929137
Show Author Affiliations
Osami Sasaki, Niigata Univ. (Japan)
Takahiro Kurashige, Niigata Univ. (Japan)
Samuel Choi, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)

Published in SPIE Proceedings Vol. 8493:
Interferometry XVI: Techniques and Analysis
Joanna Schmit; Katherine Creath; Catherine E. Towers; Jan Burke, Editor(s)

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