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Proceedings Paper

Structural And Gas Sensing Properties of Sprayed Antimony Doped Tin-Oxide Thin Films.
Author(s): P. S. Joshi; D. S. Sutrave; S. M. Jogade; B. N. Jamadar
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Paper Abstract

Metal oxides currently constitute the most investigated groups of gas sensors. Among various metal oxides, tin-oxide has emerged as one of the potential candidate due to high conductivity coupled with high sensitivity to both oxidizing and reducing gases. In this context, attempts are made to deposit thin film of tin-oxide doped with antimony by spray pyrolysis technique on glass substrate which were heated at 375°C. The concentration of antimony was increased from 0.01% to 1%. The films obtained were blackish in color. The XRD pattern shows characteristic tin-oxide peaks with tetragonal structure. The NO2 gas sensing properties were investigated at 250°C, it showed maximum sensitivity for the SnO2:Sb films with 1% Sb concentration.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85490Y (15 October 2012); doi: 10.1117/12.926870
Show Author Affiliations
P. S. Joshi, Walchand institute of Technology (India)
D. S. Sutrave, D.B.F. Dayanand College of Arts and Science (India)
S. M. Jogade, D.B.F. Dayanand College of Arts and Science (India)
B. N. Jamadar, Willingdon College of Arts and Science (India)

Published in SPIE Proceedings Vol. 8549:
16th International Workshop on Physics of Semiconductor Devices
Monica Katiyar; B. Mazhari; Y N Mohapatra, Editor(s)

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