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Proceedings Paper

Progress with MEMS x-ray micro pore optics
Author(s): Yuichiro Ezoe; Teppei Moriyama; Tomohiro Ogawa; Takuya Kakiuchi; Takaya Ohashi; Ikuyuki Mitsuishi; Kazuhisa Mitsuda; Mitsuhiro Horade; Susumu Sugiyama; Raul E. Riveros; Hitomi Yamaguchi; Yoshiaki Kanamori; Kohei Morishita; Kazuo Nakajima; Ryutaro Maeda
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Paper Abstract

Our development of ultra light-weight X-ray micro pore optics based on MEMS (Micro Electro Mechanical System) technologies is described. Using dry etching or X-ray lithography and electroplating, curvilinear sidewalls through a flat wafer are fabricated. Sidewalls vertical to the wafer surface are smoothed by use of high temperature annealing and/or magnetic field assisted finishing to work as X-ray mirrors. The wafer is then deformed to a spherical shape. When two spherical wafers with different radii of curvature are stacked, the combined system will be an approximated Wolter type-I telescope. This method in principle allows high angular resolution and ultra light-weight X-ray micro pore optics. In this paper, performance of a single-stage optic, coating of a heavy metal on sidewalls with atomic layer deposition, and assembly of a Wolter type-I telescope are reported.

Paper Details

Date Published: 17 September 2012
PDF: 11 pages
Proc. SPIE 8443, Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, 84430U (17 September 2012); doi: 10.1117/12.925811
Show Author Affiliations
Yuichiro Ezoe, Tokyo Metropolitan Univ. (Japan)
Teppei Moriyama, Tokyo Metropolitan Univ. (Japan)
Tomohiro Ogawa, Tokyo Metropolitan Univ. (Japan)
Takuya Kakiuchi, Tokyo Metropolitan Univ. (Japan)
Takaya Ohashi, Tokyo Metropolitan Univ. (Japan)
Ikuyuki Mitsuishi, Tokyo Metropolitan Univ. (Japan)
Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (Japan)
Kazuhisa Mitsuda, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (Japan)
Mitsuhiro Horade, Nagoya Univ. (Japan)
Susumu Sugiyama, Ritsumeikan Univ. (Japan)
Raul E. Riveros, Univ. of Florida (United States)
Hitomi Yamaguchi, Univ. of Florida (United States)
Yoshiaki Kanamori, Tohoku Univ. (Japan)
Kohei Morishita, Kyoto Univ. (Japan)
Kazuo Nakajima, Kyoto Univ. (Japan)
Ryutaro Maeda, National Institute of Advanced Industrial Science and Technology (Japan)

Published in SPIE Proceedings Vol. 8443:
Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray
Tadayuki Takahashi; Stephen S. Murray; Jan-Willem A. den Herder, Editor(s)

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