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Proceedings Paper

Design and simulation of Pt-based microhotplate, and fabrication of suspended dielectric membrane by bulk micromachining
Author(s): Mahanth Prasad; R. P. Yadav; V. Sahula; V. K. Khanna
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Paper Abstract

The paper presents the design and simulation of double spiral Pt-based microhotplate (MHP) for gas sensing application. A platinum resistor of 52 Ω has been designed and simulated on a 0.3 micron thick SiO2 suspended membrane of size 40 × 40 μm2 using ANSYS. The SiO2 membrane of size 40 × 40 μμm2 and thickness 0.3 micron has been fabricated successfully by bulk micromachining in <100< orientation P-type silicon using 25% tetra methyl ammonium hydroxide (TMAH) solution. The simulated temperature and transit time response of microhotplate were obtained as 600.5 °C and 0.2 ms respectively at 4.8 mW power consumption.

Paper Details

Date Published: 15 October 2012
PDF: 10 pages
Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85491C (15 October 2012); doi: 10.1117/12.925318
Show Author Affiliations
Mahanth Prasad, CSIR-Central Electronics Engineering Research Institute (India)
R. P. Yadav, Rajasthan Technical Univ. (India)
V. Sahula, Malaviya National Institute of Technology (India)
V. K. Khanna, CSIR-Central Electronics Engineering Research Institute (India)


Published in SPIE Proceedings Vol. 8549:
16th International Workshop on Physics of Semiconductor Devices
Monica Katiyar; B. Mazhari; Y N Mohapatra, Editor(s)

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