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Proceedings Paper

Evaluation of nano-level 3D shape extraction system using RGB color interference fringes
Author(s): S. Hata; S. Morimoto; H. Kobayashi
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Paper Abstract

Nano-level 3-D measurement is one of the key technologies for the current and future generation of production systems for semi-conductors, LCDs and nano-devices. To meet with these applications, wide range nano-level 3-D shape measurement method using combination of RGB lights has been developed. It measures the height of nano-objects using RGB lights interference color fringes. To analyze the RGB color fringes, the adaptive phase analysis method of interference fringes has been developed and achieved its efficiency. But it cannot measure the shape of edges. To meet with the difficulty, the color analysis method on xy-color plane has been introduced. The combination of the phase measurement method and the color analysis method has measured the 5 micrometer columns precisely. The evaluation shows that the method has the ability to measure the plane height at 10 nm level measuring deviation with 0,5 micrometer horizontal preciseness. For a practical application, the shape of needles for AFM has been extracted, successfully.

Paper Details

Date Published: 17 May 2012
PDF: 10 pages
Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84300M (17 May 2012); doi: 10.1117/12.924099
Show Author Affiliations
S. Hata, Kagawa Univ. (Japan)
S. Morimoto, Rexxam Co., Ltd. (Japan)
H. Kobayashi, Kagawa Prefecture Industrial Technology Ctr. (Japan)

Published in SPIE Proceedings Vol. 8430:
Optical Micro- and Nanometrology IV
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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