
Proceedings Paper
A micro-SPM head array with exchangeable cantileversFormat | Member Price | Non-Member Price |
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Paper Abstract
In this paper a MEMS based micro-SPM head array is proposed to enhance the performance of the currently available
nano-measuring machines and effectively reduce the measurement time for large specimen. It consists of 1 × N ( N = 7
in our case) micro-SPM heads/units, realized in one chip by MEMS technique. And it can be easily extended to a micro-
SPM head matrix. The main part of the micro-SPM head is the MEMS-positioning stage, which is realized on the basis
of an electrostatic lateral comb-drive actuator. In order to take the advantage of the high lateral resolution of
conventional cantilevers, a flexible cantilever gripper was designed to be integrated into the MEMS-positioning stage
within the SPM head. Conventional cantilevers can be mechanically mounted onto the MEMS-positioning stage or
dismantled from the MEMS-positioning stage after the tip is worn out. In this way, the well-designed and calibrated
MEMS-positioning stage can be repeatedly and efficiently utilized. The structure design and simulation of mechanical
and electrical performances of the mico-SPM head will be detailed in this paper. First experimental results proved the
feasibility of the cantilever gripper design.
Paper Details
Date Published: 4 May 2012
PDF: 8 pages
Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84301E (4 May 2012); doi: 10.1117/12.922641
Published in SPIE Proceedings Vol. 8430:
Optical Micro- and Nanometrology IV
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)
PDF: 8 pages
Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84301E (4 May 2012); doi: 10.1117/12.922641
Show Author Affiliations
S. Gao, Physikalisch-Technische Bundesanstalt (Germany)
H. Wolff, Physikalisch-Technische Bundesanstalt (Germany)
K. Herrmann, Physikalisch-Technische Bundesanstalt (Germany)
U. Brand, Physikalisch-Technische Bundesanstalt (Germany)
H. Wolff, Physikalisch-Technische Bundesanstalt (Germany)
K. Herrmann, Physikalisch-Technische Bundesanstalt (Germany)
U. Brand, Physikalisch-Technische Bundesanstalt (Germany)
K. Hiller, Technische Univ. Chemnitz (Germany)
S. Hahn, Technische Univ. Chemnitz (Germany)
A. Sorger, Technische Univ. Chemnitz (Germany)
J. Mehner, Technische Univ. Chemnitz (Germany)
S. Hahn, Technische Univ. Chemnitz (Germany)
A. Sorger, Technische Univ. Chemnitz (Germany)
J. Mehner, Technische Univ. Chemnitz (Germany)
Published in SPIE Proceedings Vol. 8430:
Optical Micro- and Nanometrology IV
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)
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