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Proceedings Paper

Design, fabrication and measurements with a UV linear-variable optical filter microspectrometer
Author(s): Arvin Emadi; Huaiwen Wu; Ger de Graaf; Peter Enoksson; José Higino Correia; Reinoud Wolffenbuttel
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Paper Abstract

An IC-Compatible Linear-Variable Optical Filter (LVOF) for application in the UV spectral range between 310 nm and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a Xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the Mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.

Paper Details

Date Published: 9 May 2012
PDF: 10 pages
Proc. SPIE 8439, Optical Sensing and Detection II, 84390V (9 May 2012); doi: 10.1117/12.922374
Show Author Affiliations
Arvin Emadi, Delft Univ. of Technology (Netherlands)
Huaiwen Wu, Delft Univ. of Technology (Netherlands)
Ger de Graaf, Delft Univ. of Technology (Netherlands)
Peter Enoksson, Chalmers Univ. of Technology (Sweden)
José Higino Correia, Univ. of Minho (Portugal)
Reinoud Wolffenbuttel, Delft Univ. of Technology (Netherlands)

Published in SPIE Proceedings Vol. 8439:
Optical Sensing and Detection II
Francis Berghmans; Anna Grazia Mignani; Piet De Moor, Editor(s)

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