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Proceedings Paper

Design, fabrication, characterization of a polymeric nano-precision micro z-stage
Author(s): M. Ghaderi; F. Beygi Azar Aghbolagh; M. Taghavi; I. Sabri; M. Sadegh; H. Latifi
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Paper Abstract

Many applications in micro and nanotechnologies require micron-sized components, capable of positioning in ranges of sub-micrometers to a few microns. This paper reports on the design, fabrication and characterization procedure of an electrostatically actuated polymeric Nano-precision micro z-stage. Due to its ease of fabrication and great variety of functionalities, polymers have become an important material in micro fabrication technology. In contrast to piezoelectric stages, polymeric micro stage has a comparatively simple and cost effective fabrication procedure. Furthermore, low Young's Modulus of polymers made them a suitable basic material in comparison with their traditional counterparts. In this paper, SU-8 photoresist was used as the construction material and the photolithography technique were used to realize the stage. SU-8 with its low Young's modulus (5 GPa), has a higher tendency for bending, compared to, for example, silicon nitride (150-350 GPa). These properties make the SU-8 polymer, suitable for various applications.

Paper Details

Date Published: 8 May 2012
PDF: 7 pages
Proc. SPIE 8428, Micro-Optics 2012, 84281I (8 May 2012); doi: 10.1117/12.922049
Show Author Affiliations
M. Ghaderi, Delft Univ. of Technology (Netherlands)
F. Beygi Azar Aghbolagh, Shahid Beheshti Univ. (Iran, Islamic Republic of)
M. Taghavi, Shahid Beheshti Univ. (Iran, Islamic Republic of)
I. Sabri, Shahid Beheshti Univ. (Iran, Islamic Republic of)
M. Sadegh, Shahid Beheshti Univ. (Iran, Islamic Republic of)
H. Latifi, Shahid Beheshti Univ. (Iran, Islamic Republic of)

Published in SPIE Proceedings Vol. 8428:
Micro-Optics 2012
Hugo Thienpont; Jürgen Mohr; Hans Zappe; Hirochika Nakajima, Editor(s)

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