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Proceedings Paper

Direct laser writing of 3D micro/nanostructures on opaque surfaces
Author(s): Sima Rekštytė; Albertas Žukauskas; Vytautas Purlys; Yuri Gordienko; Mangirdas Malinauskas
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Paper Abstract

Spectra of fields for applications of polymeric 3D micro/nanostructures is rapidly widening thus demanding the development of versatile precise and efficient fabrication methods that can be used to process a variety of materials and could be implemented to form tiny devices on a variety of surfaces without influencing their structural quality. We present the latest results obtained using laser lithography approach: 3D polymeric structures with submicrometer spatial resolution on different opaque surfaces such as semiconductors (Si) and various metals (Cr, Al, Fe, Ti). The photostructuring was performed using a range of photosensitive materials such as acrylate based AKRE23, acrylated biodegradable PEG-DA-258, epoxy based mr-NIL 6000, hybrid organic-inorganic SZ2080 and Ormocore b59.

Paper Details

Date Published: 10 May 2012
PDF: 9 pages
Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 843123 (10 May 2012); doi: 10.1117/12.921387
Show Author Affiliations
Sima Rekštytė, Vilnius Univ. (Lithuania)
Albertas Žukauskas, Vilnius Univ. (Lithuania)
Vytautas Purlys, Vilnius Univ. (Lithuania)
Yuri Gordienko, G. V. Kurdyumov Institute for Metal Physics (Ukraine)
Mangirdas Malinauskas, Vilnius Univ. (Lithuania)

Published in SPIE Proceedings Vol. 8431:
Silicon Photonics and Photonic Integrated Circuits III
Laurent Vivien; Seppo K. Honkanen; Lorenzo Pavesi; Stefano Pelli, Editor(s)

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