Teledyne Judson Technologies (TJT) has been developing technology for small pixel, large format, low dark current, and low capacitance NIR/SWIR InGaAs detector arrays, aiming to produce <10μm pixels and >2Kx2K format arrays that can be operated at or near room temperature. Furthermore, TJT is now developing technology for sub-10μm pixel arrays in response to requirements for a variety of low light level (LLL) imaging applications. In this paper, we will review test data that demonstrates lower dark current density for 10-20μm pixel arrays. We will present preliminary results on the successful fabrication of test arrays with pixels as small as 5μm. In addition, a lot of effort has been made to control and reduce the detector pixel capacitance which can become another source of detector noise. TJT is also developing 4" InGaAs wafer process and now offers four different types of InGaAs 2D arrays/FPAs that are tailored to different customer requirements for dark current, capacitance, spectral response, and bias range.

Date Published: 31 May 2012
PDF: 8 pages
Proc. SPIE 8353, Infrared Technology and Applications XXXVIII, 835309 (31 May 2012); doi: 10.1117/12.921232

Published in SPIE Proceedings Vol. 8353:
Infrared Technology and Applications XXXVIII
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)