Recent development in miniaturized electronic devices has increased the demand for power sources that are sufficiently compact and can potentially be integrated on a chip with other electronic components. Miniaturized electrochemical capacitors (EC) or micro-supercapacitors have great potential to complement or replace batteries and electrolytic capacitors in a variety of applications. Recently, we have developed several types of micro-supercapacitors with different structural designs and active materials. Carbon-Microelectromechanical Systems (C-MEMS) with three dimensional (3D) interdigital structures are employed both as electrode material for electric double layer capacitor (EDLC) or as three dimensional (3D) current collectors of pseudo-capacitive materials. More recently, we have also developed microsupercapacitor based on hybrid graphene and carbon nanotube interdigital structures. In this paper, the recent advances in design and fabrication of on-chip micro-supercapacitors are reviewed.

Date Published: 24 May 2012
PDF: 10 pages
Proc. SPIE 8377, Energy Harvesting and Storage: Materials, Devices, and Applications III, 837708 (24 May 2012); doi: 10.1117/12.920819

Published in SPIE Proceedings Vol. 8377:
Energy Harvesting and Storage: Materials, Devices, and Applications III
Nibir K. Dhar; Priyalal S. Wijewarnasuriya; Achyut K. Dutta, Editor(s)