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Proceedings Paper

Inspection and metrology for through-silicon vias and 3D integration
Author(s): Andrew C. Rudack
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Paper Abstract

3D IC integration employs advanced interconnect technologies including through-silicon vias (TSVs), bonding, wafer thinning, backside processing and fine pitch multi-chip stacking. In 2013, Mobile Wide I/O DRAM is expected to be one of the first high volume 3D IC applications. Many of the manufacturing steps in TSV processing and 3D integration can complicate inspection and metrology. This paper reviews a typical via-mid flow emphasizing the inspection and metrology challenges inherent in 3D integration. A preliminary look at the 2011 ITRS roadmap for 3D interconnect metrology is presented, including the gaps in currently available inspection and metrology tools.

Paper Details

Date Published: 4 April 2012
PDF: 7 pages
Proc. SPIE 8324, Metrology, Inspection, and Process Control for Microlithography XXVI, 832403 (4 April 2012); doi: 10.1117/12.920301
Show Author Affiliations
Andrew C. Rudack, SEMATECH (United States)

Published in SPIE Proceedings Vol. 8324:
Metrology, Inspection, and Process Control for Microlithography XXVI
Alexander Starikov, Editor(s)

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